JPH0521824Y2 - - Google Patents
Info
- Publication number
- JPH0521824Y2 JPH0521824Y2 JP3154787U JP3154787U JPH0521824Y2 JP H0521824 Y2 JPH0521824 Y2 JP H0521824Y2 JP 3154787 U JP3154787 U JP 3154787U JP 3154787 U JP3154787 U JP 3154787U JP H0521824 Y2 JPH0521824 Y2 JP H0521824Y2
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- electrodes
- insulator
- cylindrical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 21
- 238000005192 partition Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 239000012212 insulator Substances 0.000 description 25
- 238000010894 electron beam technology Methods 0.000 description 12
- 238000003466 welding Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3154787U JPH0521824Y2 (en]) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3154787U JPH0521824Y2 (en]) | 1987-03-04 | 1987-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63139757U JPS63139757U (en]) | 1988-09-14 |
| JPH0521824Y2 true JPH0521824Y2 (en]) | 1993-06-04 |
Family
ID=30837386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3154787U Expired - Lifetime JPH0521824Y2 (en]) | 1987-03-04 | 1987-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521824Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010146833A1 (ja) * | 2009-06-16 | 2010-12-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1987
- 1987-03-04 JP JP3154787U patent/JPH0521824Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63139757U (en]) | 1988-09-14 |
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